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Heated 700 Series Vacuum Pressure Transducers
Setra Models 764/769/774
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| These pressure transducers offer integral heated sensors and electronics, temperature controlled to your choice of 45°C, 100°C, or 123°C. Designed to safeguard against process contamination and improve the integrity of your process, these pressure transducers exhibit exceptional performance. These units offer an accuracy of ±15% of Reading with a resolution of 0.005% of Full scale in pressure ranges as low as 50 mTorr up to 1000 Torr. |
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Applications
- Plasma Deposition/Etch
- Sputtering/PVD/RTP
- Industrial CVD/Ion Implantation
- LPCVD
- Crystal Growing/Freeze Dryers
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| Heated 700 Series Specifications |
| Model 764 |
Temperature controlled to 45°C |
| Model 769 |
Temperature controlled to 100°C |
| Model 774 |
Temperature controlled to 123°C |
| Type of Pressure |
Absolute |
| Electrical Output (Voltage) |
0 to 10 VDC
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| Resolution |
0.005% of FS |
| Accuracy |
±0.15% of Reading + 005% of FS |
| Excitation |
±15 VDC ±5% Regulated to 1% |
| Pressure Ranges |
50 mTorr: Model 764 only
100 mTorr: Model 764 and 769 only
0 to 1, 2, 10, 100, 1000 Torr
1, 10, 100, 1000 Millibar/hPa |
| Thermal Effects |
- Compensated Range °C: +15 to +40
- Zero Shift: >1 Torr = 0.002% FS/°C
- <= 1 Torr = 0.005% FS/°C
Span Shift: ±0.02% Rdg/°C
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| Media |
Gases compatible with Inconel® |
Click here for data sheetModel 764/769/77
* Specifications subject to change without notice.
If you don't see what you need here, please contact us. |
Powerful Solutions for Instrumentation & Control Problems!
Heated 700 Series Vacuum Pressure Transducers Setra Models 764/769/774 |
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